Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Recent Results on Reactive Magnetron Sputtering for High-Rate Deposition of Ceramic Compound Films
Recent Results on Reactive Magnetron Sputtering for High-Rate Deposition of Ceramic Compound Films
Recent Results on Reactive Magnetron Sputtering for High-Rate Deposition of Ceramic Compound Films
Billard, A. (Autor:in) / Frantz, C. (Autor:in)
MATERIALS SCIENCE FORUM ; 287/288 ; 107-116
01.01.1998
10 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Study on Deposition Rate of AlN Thin Films Using Reactive Magnetron Sputtering
| British Library Online Contents | 2002
RF reactive magnetron sputtering for Fe-doped titania films deposited from ceramic targets
| British Library Online Contents | 2005
In situ deposition of PbTiO3 thin films by direct current reactive magnetron sputtering
| British Library Online Contents | 2016
Deposition of Titanium Nitride Thin Films onto Silicon by RF Reactive Magnetron Sputtering
| British Library Online Contents | 2009
Influence of Magnetron Sputtering Parameters on Deposition Rate of TiO~2 Films
| British Library Online Contents | 2014