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Interfacial morphologies and possible mechanisms of copper wafer bonding
Interfacial morphologies and possible mechanisms of copper wafer bonding
Interfacial morphologies and possible mechanisms of copper wafer bonding
Chen, K. N. (Autor:in) / Fan, A. (Autor:in) / Reif, R. (Autor:in)
JOURNAL OF MATERIALS SCIENCE ; 37 ; 3441 - 3446
01.01.2002
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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