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The energy spectra of secondary ions sputtered from Si and SiGe by ultra-low-energy primary ions
The energy spectra of secondary ions sputtered from Si and SiGe by ultra-low-energy primary ions
The energy spectra of secondary ions sputtered from Si and SiGe by ultra-low-energy primary ions
Bellingham, J. (Autor:in) / Dowsett, M. G. (Autor:in)
APPLIED SURFACE SCIENCE ; 203-204 ; 130-133
01.01.2003
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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