The energy spectra of secondary ions sputtered from Si and SiGe by ultra-low-energy primary ions: Fid-Bau Portal

The energy spectra of secondary ions sputtered from Si and SiGe by ultra-low-energy primary ions

Bellingham, J. / Dowsett, M. G.

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The energy spectra of secondary ions sputtered from Si and SiGe by ultra-low-energy primary ions

Bellingham, J. / Dowsett, M. G.

The energy spectra of secondary ions sputtered from Si and SiGe by ultra-low-energy primary ions

Bellingham, J. / Dowsett, M. G.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

The energy spectra of secondary ions sputtered from Si and SiGe by ultra-low-energy primary ions

Contributors:

Bellingham, J. (author) / Dowsett, M. G. (author)

Published in:

APPLIED SURFACE SCIENCE ; 203-204 ; 130-133

Publication date:

2003-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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