Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Investigating oxygen flooding at oblique 2 and 1 keV oxygen sputtering for microelectronics support applications
Investigating oxygen flooding at oblique 2 and 1 keV oxygen sputtering for microelectronics support applications
Investigating oxygen flooding at oblique 2 and 1 keV oxygen sputtering for microelectronics support applications
Jahnel, F. (Autor:in) / von Criegern, R. (Autor:in)
APPLIED SURFACE SCIENCE ; 203-204 ; 367-370
01.01.2003
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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