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    Investigating oxygen flooding at oblique 2 and 1 keV oxygen sputtering for microelectronics support applications

    New search for: Jahnel, F.
    New search for: von Criegern, R.

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    Investigating oxygen flooding at oblique 2 and 1 keV oxygen sputtering for microelectronics support applications

    New search for: Jahnel, F.
    New search for: von Criegern, R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Investigating oxygen flooding at oblique 2 and 1 keV oxygen sputtering for microelectronics support applications

    New search for: Jahnel, F.
    New search for: von Criegern, R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
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    Document information
    Title:

    Investigating oxygen flooding at oblique 2 and 1 keV oxygen sputtering for microelectronics support applications

    Contributors:

    Jahnel, F. (author) / von Criegern, R. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 203-204 ; 367-370

    Publication date:

    2003-01-01

    Size:

    4 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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