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Patterned Microstructures of Porous Silicon by Dry-Removal Soft Lithography
Patterned Microstructures of Porous Silicon by Dry-Removal Soft Lithography
Patterned Microstructures of Porous Silicon by Dry-Removal Soft Lithography
Sirbuly, D. J. (author) / Lowman, G. M. (author) / Scott, B. (author) / Stucky, G. D. (author) / Buratto, S. K. (author)
ADVANCED MATERIALS -DEERFIELD BEACH THEN WEINHEIM- ; 15 ; 149-152
2003-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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