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Hafnium oxide layers derived by photo-assisted sol-gel processing
Hafnium oxide layers derived by photo-assisted sol-gel processing
Hafnium oxide layers derived by photo-assisted sol-gel processing
Yu, J. J. (Autor:in) / Fang, Q. (Autor:in) / Zhang, J. Y. (Autor:in) / Wang, Z. M. (Autor:in) / Boyd, I. W. (Autor:in)
APPLIED SURFACE SCIENCE ; 208/209 ; 676-681
01.01.2003
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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