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Generation of ammonia plasma using a helical antenna and nitridation of GaAs surface
Generation of ammonia plasma using a helical antenna and nitridation of GaAs surface
Generation of ammonia plasma using a helical antenna and nitridation of GaAs surface
Yasui, K. (Autor:in) / Arayama, T. (Autor:in) / Okutani, S. (Autor:in) / Akahane, T. (Autor:in)
APPLIED SURFACE SCIENCE ; 212-213 ; 619-624
01.01.2003
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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