Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
An investigation of the effects of thickness on mechanical properties of LIGA nickel MEMS structures
An investigation of the effects of thickness on mechanical properties of LIGA nickel MEMS structures
An investigation of the effects of thickness on mechanical properties of LIGA nickel MEMS structures
Lou, J. (Autor:in) / Allameh, S. (Autor:in) / Buccheit, T. (Autor:in) / Soboyejo, W. O. (Autor:in)
JOURNAL OF MATERIALS SCIENCE ; 38 ; 4129-4135
01.01.2003
7 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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