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Micromachining of large area amorphous carbon membranes prepared by filtered cathodic vacuum arc technique

Liujiang, Y. / Tay, B. K. / Sheeja, D. / Fu, Y. Q. / Miao, J. M.

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Micromachining of large area amorphous carbon membranes prepared by filtered cathodic vacuum arc technique

Liujiang, Y. / Tay, B. K. / Sheeja, D. / Fu, Y. Q. / Miao, J. M.

Micromachining of large area amorphous carbon membranes prepared by filtered cathodic vacuum arc technique

Liujiang, Y. / Tay, B. K. / Sheeja, D. / Fu, Y. Q. / Miao, J. M.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Micromachining of large area amorphous carbon membranes prepared by filtered cathodic vacuum arc technique

Contributors:

Liujiang, Y. (author) / Tay, B. K. (author) / Sheeja, D. (author) / Fu, Y. Q. (author) / Miao, J. M. (author)

Published in:

APPLIED SURFACE SCIENCE ; 223 ; 286-293

Publication date:

2004-01-01

Size:

8 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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