Compressively strained Ge channels on relaxed SiGe buffer layers

Bollani, M. / Muller, E. / Signoretti, S. et al. | British Library Online Contents | 2003

Relaxed SiGe buffer layer growth with point defect injection

Lyutovich, K. / Kasper, E. / Ernst, F. et al. | British Library Online Contents | 2000

Matrix effects in SIMS depth profiles of SiGe relaxed buffer layers

Sanchez-Almazan, F. / Napolitani, E. / Carnera, A. et al. | British Library Online Contents | 2004

Surface smoothing of SiGe strain-relaxed buffer layers by chemical mechanical polishing

Sawano, K. / Kawaguchi, K. / Ueno, T. et al. | British Library Online Contents | 2002

Growth and characterization of strain-relaxed SiGe buffer layers on Si(001) substrates with pure-edge misfit dislocations

Taoka, N. / Sakai, A. / Egawa, T. et al. | British Library Online Contents | 2005