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Resonant tunneling in Si-SiGe superlattices on relaxed buffer substrates

Tsujino, S. / Mentese, S. / Diehl, L. / Muller, E. / Haas, B. / Bachle, D. / Stutz, S. / Grutzmacher, D. / Campidelli, Y. / Kermarrec, O.

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Resonant tunneling in Si-SiGe superlattices on relaxed buffer substrates

Tsujino, S. / Mentese, S. / Diehl, L. / Muller, E. / Haas, B. / Bachle, D. / Stutz, S. / Grutzmacher, D. / Campidelli, Y. / Kermarrec, O.

Resonant tunneling in Si-SiGe superlattices on relaxed buffer substrates

Tsujino, S. / Mentese, S. / Diehl, L. / Muller, E. / Haas, B. / Bachle, D. / Stutz, S. / Grutzmacher, D. / Campidelli, Y. / Kermarrec, O.

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Document information

Title:

Resonant tunneling in Si-SiGe superlattices on relaxed buffer substrates

Contributors:

Tsujino, S. (author) / Mentese, S. (author) / Diehl, L. (author) / Muller, E. (author) / Haas, B. (author) / Bachle, D. (author) / Stutz, S. (author) / Grutzmacher, D. (author) / Campidelli, Y. (author) / Kermarrec, O. (author)

Published in:

APPLIED SURFACE SCIENCE ; 224 ; 377-381

Publication date:

2004-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Bollani, M. / Muller, E. / Signoretti, S. et al. | British Library Online Contents | 2003

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Lyutovich, K. / Kasper, E. / Ernst, F. et al. | British Library Online Contents | 2000

Matrix effects in SIMS depth profiles of SiGe relaxed buffer layers

Sanchez-Almazan, F. / Napolitani, E. / Carnera, A. et al. | British Library Online Contents | 2004

Surface smoothing of SiGe strain-relaxed buffer layers by chemical mechanical polishing

Sawano, K. / Kawaguchi, K. / Ueno, T. et al. | British Library Online Contents | 2002

Growth and characterization of strain-relaxed SiGe buffer layers on Si(001) substrates with pure-edge misfit dislocations

Taoka, N. / Sakai, A. / Egawa, T. et al. | British Library Online Contents | 2005