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Low-temperature silicon homoepitaxial growth by pulsed magnetron sputtering
Low-temperature silicon homoepitaxial growth by pulsed magnetron sputtering
Low-temperature silicon homoepitaxial growth by pulsed magnetron sputtering
Reinig, P. (Autor:in) / Fenske, F. (Autor:in) / Selle, B. (Autor:in) / Bohne, W. (Autor:in) / Rohrich, J. (Autor:in) / Sieber, I. (Autor:in) / Fuhs, W. (Autor:in)
APPLIED SURFACE SCIENCE ; 227 ; 114-121
01.01.2004
8 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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