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Interfacial reactions between RF sputtered CeO2 film and Si(100) substrate
Interfacial reactions between RF sputtered CeO2 film and Si(100) substrate
Interfacial reactions between RF sputtered CeO2 film and Si(100) substrate
Lee, H. Y. (Autor:in) / Lee, Y. C. (Autor:in) / Hong, Y. P. (Autor:in) / Ko, K. H. (Autor:in)
APPLIED SURFACE SCIENCE ; 228 ; 164-168
01.01.2004
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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