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Interfacial reactions between RF sputtered CeO2 film and Si(100) substrate
Interfacial reactions between RF sputtered CeO2 film and Si(100) substrate
Interfacial reactions between RF sputtered CeO2 film and Si(100) substrate
Lee, H. Y. (author) / Lee, Y. C. (author) / Hong, Y. P. (author) / Ko, K. H. (author)
APPLIED SURFACE SCIENCE ; 228 ; 164-168
2004-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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