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Development of a Micro Gyroscope Using Epitaxial Polysilicon and Its Performance Test
Development of a Micro Gyroscope Using Epitaxial Polysilicon and Its Performance Test
Development of a Micro Gyroscope Using Epitaxial Polysilicon and Its Performance Test
Sung, W. T. (Autor:in) / Lim, H. T. (Autor:in) / Kang, T. (Autor:in) / Lee, J. G. (Autor:in) / Lee, Y. J. (Autor:in) / Kishimoto, K. / Kikuchi, M. / Shoji, T. / Saka, M.
01.01.2004
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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