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Development of a Micro Gyroscope Using Epitaxial Polysilicon and Its Performance Test
Development of a Micro Gyroscope Using Epitaxial Polysilicon and Its Performance Test
Development of a Micro Gyroscope Using Epitaxial Polysilicon and Its Performance Test
Sung, W. T. (author) / Lim, H. T. (author) / Kang, T. (author) / Lee, J. G. (author) / Lee, Y. J. (author) / Kishimoto, K. / Kikuchi, M. / Shoji, T. / Saka, M.
2004-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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