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Role of Substrate on the Growth Process of Polycrystalline Silicon Thin Films by Low-Pressure Chemical Vapour Deposition
Role of Substrate on the Growth Process of Polycrystalline Silicon Thin Films by Low-Pressure Chemical Vapour Deposition
Role of Substrate on the Growth Process of Polycrystalline Silicon Thin Films by Low-Pressure Chemical Vapour Deposition
Pereira, L. (Autor:in) / Aguas, H. (Autor:in) / Raniero, L. (Autor:in) / Martins, R. M. S. (Autor:in) / Fortunato, E. (Autor:in) / Martins, R. (Autor:in)
MATERIALS SCIENCE FORUM ; 455/456 ; 112-115
01.01.2004
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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