Anisotropy of chemical mechanical polishing in silicon carbide substrates

Chen, X. F. / Xu, X. G. / Hu, X. B. et al. | British Library Online Contents | 2007

Research on the Hydrodynamic Electro-Chemical Mechanical Polishing for Silicon Wafer with Suspension Fluid

Zhan, J.M. / Zheng, D. | British Library Online Contents | 2008

Silicon carbide atmosphere plasma polishing equipment and polishing method thereof

WU MINGYANG / LIANG FENGSHUANG / LIU LIFEI et al. | Europäisches Patentamt | 2022

Selectivity and Residual Damage of Colloidal Silica Chemi-Mechanical Polishing of Silicon Carbide

Grim, J. R. / Skowronski, M. / Everson, W. J. et al. | British Library Online Contents | 2006

Tribochemical polishing of silicon carbide in oxidant solution

Zhu, Z. / Muratov, V. / Fischer, T.E. | British Library Online Contents | 1999