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High-Speed Growth of High-Purity Epitaxial Layers with Specular Surface on 4H-SiC(0001) Face
High-Speed Growth of High-Purity Epitaxial Layers with Specular Surface on 4H-SiC(0001) Face
High-Speed Growth of High-Purity Epitaxial Layers with Specular Surface on 4H-SiC(0001) Face
Danno, K. (Autor:in) / Kimoto, T. (Autor:in) / Matsunami, H. (Autor:in)
MATERIALS SCIENCE FORUM ; 457/460 ; 197-200
01.01.2004
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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