Fast Epitaxial Growth of 4H-SiC by Chimney-Type Hot-Wall CVD

Fujihira, K. / Kimoto, T. / Matsunami, H. | British Library Online Contents | 2002

Growth of Thick Epitaxial 4H-SiC Layers by Chemical Vapor Deposition

Kordina, O. / Irvine, K. / Sumakeris, J. et al. | British Library Online Contents | 1998

Predicting Growth Rates of SiC Epitaxial Layers Grown by Hot-Wall Chemical Vapor Deposition

Danielsson, O. / Jonsson, S. / Henry, A. et al. | British Library Online Contents | 2002

Fast SiC Epitaxial Growth in a Chimney CVD Reactor and HT CVD Crystal Growth Developments

Ellison, A. / Zhang, J. / Magnusson, W. et al. | British Library Online Contents | 2000

WALL SURFACE SPRAY DEVICE INSIDE CHIMNEY

YAKUSHINJI YASUYUKI / MARUYAMA NORIO / MURANAKA HIROAKI et al. | Europäisches Patentamt | 2018