Accurate CsM^+ SIMS Aluminum Dopant Profiling in SiC

Smith, H. E. / Tsao, B. H. / Scofield, J. D. | British Library Online Contents | 2006

ToF-SIMS imaging of dopant diffusion in optical fibers

Hellsing, M. / Fokine, M. / Claesson, A. et al. | British Library Online Contents | 2003

Shallow boron dopant on silicon

Perez-Martin, A. M. / Jimenez-Rodriguez, J. J. / Jimenez-Saez, J. C. | British Library Online Contents | 2004

Ultra Shallow Depth Profiling with SIMS

Ehrke, H.-U. | British Library Online Contents | 2008

Accurate SIMS depth profiling for ultra-shallow implants using backside SIMS

Hongo, C. / Tomita, M. / Takenaka, M. et al. | British Library Online Contents | 2003