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Effect of CH4 partial pressure on the microstructure and mechanical properties of magnetron sputtered TiC films
Effect of CH4 partial pressure on the microstructure and mechanical properties of magnetron sputtered TiC films
Effect of CH4 partial pressure on the microstructure and mechanical properties of magnetron sputtered TiC films
JOURNAL OF MATERIALS SCIENCE ; 39 ; 5533-5535
01.01.2004
3 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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