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Effect of CH4 partial pressure on the microstructure and mechanical properties of magnetron sputtered TiC films
Effect of CH4 partial pressure on the microstructure and mechanical properties of magnetron sputtered TiC films
Effect of CH4 partial pressure on the microstructure and mechanical properties of magnetron sputtered TiC films
JOURNAL OF MATERIALS SCIENCE ; 39 ; 5533-5535
2004-01-01
3 pages
Article (Journal)
English
DDC:
620.11
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