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Supercritical CO~2 extraction of porogen phase: An alternative route to nanoporous dielectrics
Supercritical CO~2 extraction of porogen phase: An alternative route to nanoporous dielectrics
Supercritical CO~2 extraction of porogen phase: An alternative route to nanoporous dielectrics
Lubguban, J. A. (Autor:in) / Gangopadhyay, S. (Autor:in) / Lahlouh, B. (Autor:in) / Rajagopalan, T. (Autor:in) / Biswas, N. (Autor:in) / Sun, J. (Autor:in) / Huang, D. H. (Autor:in) / Simon, S. L. (Autor:in) / Mallikarjunan, A. (Autor:in) / Kim, H.-C. (Autor:in)
JOURNAL OF MATERIALS RESEARCH -PITTSBURGH THEN WARRENDALE- ; 19 ; 3224-3233
01.01.2004
10 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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Porous extreme low k (ELk) dielectrics using a PECVD porogen approach
British Library Online Contents | 2004
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