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Supercritical CO~2 extraction of porogen phase: An alternative route to nanoporous dielectrics
Supercritical CO~2 extraction of porogen phase: An alternative route to nanoporous dielectrics
Supercritical CO~2 extraction of porogen phase: An alternative route to nanoporous dielectrics
Lubguban, J. A. (author) / Gangopadhyay, S. (author) / Lahlouh, B. (author) / Rajagopalan, T. (author) / Biswas, N. (author) / Sun, J. (author) / Huang, D. H. (author) / Simon, S. L. (author) / Mallikarjunan, A. (author) / Kim, H.-C. (author)
JOURNAL OF MATERIALS RESEARCH -PITTSBURGH THEN WARRENDALE- ; 19 ; 3224-3233
2004-01-01
10 pages
Article (Journal)
English
DDC:
620.11
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Porous extreme low k (ELk) dielectrics using a PECVD porogen approach
British Library Online Contents | 2004
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