The growth of silicon nitride crystalline films using microwave plasma enhanced chemical vapor deposition

Grannen, K. J. / Xiong, F. / Chang, R. P. H. | British Library Online Contents | 1994

Synthesis of Crystalline Carbon Nitride by Microwave Plasma Chemical Vapor Deposition

Jiang, J. / Cheng, W. / Zhang, Y. et al. | British Library Online Contents | 2005

Effect of silicon impurity on carbon nitride films prepared by microwave plasma chemical vapor deposition

Zhang, Y. P. / Gu, Y. S. | British Library Online Contents | 2001

Carbon Nanowalls Grown by Microwave Plasma Enhanced Chemical Vapor Deposition

Wu, Y. / Qiao, P. / Chong, T. et al. | British Library Online Contents | 2002

Crystalline carbon nitride films prepared by microwave plasma chemical vapour deposition

Jiang, J. / Cheng, W. / Zhang, Y. et al. | British Library Online Contents | 2006