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Investigations on the morphology of silicon surfaces anisotropically etched with TMAH
Investigations on the morphology of silicon surfaces anisotropically etched with TMAH
Investigations on the morphology of silicon surfaces anisotropically etched with TMAH
Thong, J. T. (Autor:in) / Bai, Y. (Autor:in) / Luo, P. (Autor:in) / Choi, W. K. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 72 ; 177 - 179
01.01.2000
3 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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