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Femtosecond versus nanosecond laser machining: comparison of induced stresses and structural changes in silicon wafers
Femtosecond versus nanosecond laser machining: comparison of induced stresses and structural changes in silicon wafers
Femtosecond versus nanosecond laser machining: comparison of induced stresses and structural changes in silicon wafers
Amer, M. S. (Autor:in) / El-Ashry, M. A. (Autor:in) / Dosser, L. R. (Autor:in) / Hix, K. E. (Autor:in) / Maguire, J. F. (Autor:in) / Irwin, B. (Autor:in)
APPLIED SURFACE SCIENCE ; 242 ; 162-167
01.01.2005
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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