Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Induced stresses and structural changes in silicon wafers as a result of laser micro-machining
Induced stresses and structural changes in silicon wafers as a result of laser micro-machining
Induced stresses and structural changes in silicon wafers as a result of laser micro-machining
Amer, M. S. (Autor:in) / Dosser, L. (Autor:in) / LeClair, S. (Autor:in) / Maguire, J. F. (Autor:in)
APPLIED SURFACE SCIENCE ; 187 ; 291-296
01.01.2002
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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