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Characterization of nanolayers by sputter depth profiling
Characterization of nanolayers by sputter depth profiling
Characterization of nanolayers by sputter depth profiling
Hofmann, S. (Autor:in)
APPLIED SURFACE SCIENCE ; 241 ; 113-121
01.01.2005
9 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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