A study of silicon oxynitride film prepared by ion beam assisted deposition

Wang, Y. / Cheng, X. / Lin, Z. et al. | British Library Online Contents | 2004

Hafnium silicon oxide films prepared by atomic layer deposition

Kukli, K. / Ritala, M. / Leskela, M. et al. | British Library Online Contents | 2004

SIMS study on N diffusion in hafnium oxynitride

Gui, D. / Kang, J. / Yu, H. et al. | British Library Online Contents | 2004

Magnesium Oxide Films Prepared by Ion Beam-assisted Deposition

Zhinong, Y. / Xiaojun, L. / Dexiu, Z. | British Library Online Contents | 2001

Hafnium Carbide Films and Film-Coated Field Emission Cathodes

Mackie, W. A. / Xie, T. / Blackwood, J. E. et al. | British Library Conference Proceedings | 1996