Back side SIMS analysis of hafnium silicate

Gu, C. / Stevie, F. A. / Bennett, J. et al. | British Library Online Contents | 2006

Field emission from hafnium oxynitride films prepared by ion beam-assisted deposition

Wang, Y. / Zhang, J. / Zhang, F. et al. | British Library Online Contents | 2005

Ultra low energy SIMS depth profiling of sub-1.5nm silicon oxynitride films

Mulcahy, C. P. / Bock, B. / Ebblewhite, P. A. et al. | British Library Online Contents | 2006

Quantitative depth profiling of nitrogen in ultrathin oxynitride film with low energy SIMS

Shon, H. K. / Kang, H. J. / Hong, T. E. et al. | British Library Online Contents | 2003

Deuterium diffusion into plasma-deposited silicon oxynitride films

Arnoldbik, W. M. / Maree, C. H. M. / Habraken, F. H. P. M. | British Library Online Contents | 1994