Atomic layer deposition of hafnium and zirconium silicate thin films

Vainonen-Ahlgren, E. / Tois, E. / Ahlgren, T. et al. | British Library Online Contents | 2003

Characteristics of hafnium oxide grown on silicon by atomic-layer deposition using tetrakis(ethylmethylamino)hafnium and water vapor as precursors

Chiou, Y.-K. / Chang, C.-H. / Wu, T.-B. | British Library Online Contents | 2007

Phase transformations in hafnium dioxide thin films grown by atomic layer deposition at high temperatures

Aarik, J. / Aidla, A. / Mandar, H. et al. | British Library Online Contents | 2001

TEM and ellipsometry studies of nanolaminate oxide films prepared using atomic layer deposition

Mitchell, D. R. / Attard, D. J. / Finnie, K. S. et al. | British Library Online Contents | 2005

Field emission from hafnium oxynitride films prepared by ion beam-assisted deposition

Wang, Y. / Zhang, J. / Zhang, F. et al. | British Library Online Contents | 2005