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High Temperature Rapid Thermal Oxidation and Nitridation of 4H-SiC in Diluted N~2O and NO Ambient
High Temperature Rapid Thermal Oxidation and Nitridation of 4H-SiC in Diluted N~2O and NO Ambient
High Temperature Rapid Thermal Oxidation and Nitridation of 4H-SiC in Diluted N~2O and NO Ambient
Kosugi, R. (Autor:in) / Fukuda, K. (Autor:in) / Arai, K. (Autor:in) / Nipoti, R. / Poggi, A. / Scorzoni, A.
01.01.2005
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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