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SIMS study of rapid thermal nitridation of silicon dioxide thick films in ammonia ambient
SIMS study of rapid thermal nitridation of silicon dioxide thick films in ammonia ambient
SIMS study of rapid thermal nitridation of silicon dioxide thick films in ammonia ambient
Breelle, E. (Autor:in) / Rigo, S. (Autor:in) / Kilner, J. A. (Autor:in) / Ganem, J.-J. (Autor:in)
APPLIED SURFACE SCIENCE ; 81 ; 127
01.01.1994
127 pages
Aufsatz (Zeitschrift)
Unbekannt
DDC:
621.35
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