Chemical mechanical polishing of thermal oxide films using silica particles coated with ceria

Lee, S.-H. / Lu, Z. / Babu, S. V. et al. | British Library Online Contents | 2002

Ceria concentration effect on chemical mechanical polishing of optical glass

Wang, L. / Zhang, K. / Song, Z. et al. | British Library Online Contents | 2007

Novel ceria-polymer microcomposites for chemical mechanical polishing

Coutinho, C. A. / Mudhivarthi, S. R. / Kumar, A. et al. | British Library Online Contents | 2008

Synthesis, characterization of ceria-coated silica particles and their chemical mechanical polishing performance on glass substrate

Zhang, Z. / Liu, W. / Zhu, J. et al. | British Library Online Contents | 2010

Surface modification of ceria nanoparticles and their chemical mechanical polishing behavior on glass substrate

Zhang, Z. / Yu, L. / Liu, W. et al. | British Library Online Contents | 2010