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Synthesis, characterization of ceria-coated silica particles and their chemical mechanical polishing performance on glass substrate

Zhang, Z. / Liu, W. / Zhu, J. / Song, Z.

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Synthesis, characterization of ceria-coated silica particles and their chemical mechanical polishing performance on glass substrate

Zhang, Z. / Liu, W. / Zhu, J. / Song, Z.

Synthesis, characterization of ceria-coated silica particles and their chemical mechanical polishing performance on glass substrate

Zhang, Z. / Liu, W. / Zhu, J. / Song, Z.

Zugriff

Zugriff über TIB

Verfügbarkeit in meiner Bibliothek prüfen

Bestellung bei Subito €

Seitennavigation

Dokumentinformationen

Ähnliche Titel

Exportieren, teilen und zitieren

Dokumentinformationen

Titel:

Synthesis, characterization of ceria-coated silica particles and their chemical mechanical polishing performance on glass substrate

Beteiligte:

Zhang, Z. (Autor:in) / Liu, W. (Autor:in) / Zhu, J. (Autor:in) / Song, Z. (Autor:in)

Erschienen in:

APPLIED SURFACE SCIENCE ; 257 ; 1750-1755

Erscheinungsdatum:

01.01.2010

Format / Umfang:

6 pages

ISSN:

0169-4332

Medientyp:

Aufsatz (Zeitschrift)

Format:

Sprache:

Englisch

Klassifikation:

DDC: 621.35

Lee, S.-H. / Lu, Z. / Babu, S. V. et al. | British Library Online Contents | 2002

Surface modification of ceria nanoparticles and their chemical mechanical polishing behavior on glass substrate

Zhang, Z. / Yu, L. / Liu, W. et al. | British Library Online Contents | 2010

Ceria concentration effect on chemical mechanical polishing of optical glass

Wang, L. / Zhang, K. / Song, Z. et al. | British Library Online Contents | 2007

Effect of pH on ceria-silica interactions during chemical mechanical polishing

Abiade, J. T. / Choi, W. / Singh, R. K. | British Library Online Contents | 2005

Novel ceria-polymer microcomposites for chemical mechanical polishing

Coutinho, C. A. / Mudhivarthi, S. R. / Kumar, A. et al. | British Library Online Contents | 2008

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