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Influence of ambient medium on femtosecond laser processing of silicon
Influence of ambient medium on femtosecond laser processing of silicon
Influence of ambient medium on femtosecond laser processing of silicon
Besner, S. (Autor:in) / Degorce, J. Y. (Autor:in) / Kabashin, A. V. (Autor:in) / Meunier, M. (Autor:in)
APPLIED SURFACE SCIENCE ; 247 ; 163-168
01.01.2005
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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