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Influence of ambient medium on femtosecond laser processing of silicon

Besner, S. / Degorce, J. Y. / Kabashin, A. V. / Meunier, M.

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Influence of ambient medium on femtosecond laser processing of silicon

Besner, S. / Degorce, J. Y. / Kabashin, A. V. / Meunier, M.

Influence of ambient medium on femtosecond laser processing of silicon

Besner, S. / Degorce, J. Y. / Kabashin, A. V. / Meunier, M.

Access

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Influence of ambient medium on femtosecond laser processing of silicon

Contributors:

Besner, S. (author) / Degorce, J. Y. (author) / Kabashin, A. V. (author) / Meunier, M. (author)

Published in:

APPLIED SURFACE SCIENCE ; 247 ; 163-168

Publication date:

2005-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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