Molecular Dynamic Simulation of AFM-Based Nano Lithography Process for Fabrication of MEMS Components

Kim, Y. S. / Yang, S. H. / Kim, C. I. et al. | British Library Online Contents | 2003

Fabrication of Diffractive and Micro-optical Elements Using Microlens Projection Lithography

Wu, M.-H. / Whitesides, G. M. | British Library Online Contents | 2002

Near-field optical lithography method for fabrication of the nanodimensional objects

Dryakhlushin, V. F. / Klimov, A. Y. / Rogov, V. V. et al. | British Library Online Contents | 2005

Design and fabrication of polymeric micro-optical components using excimer laser ablation

Pan, C. T. / Shen, S. C. | British Library Online Contents | 2004

Excimer laser ablation lithography applied to the fabrication of reflective diffractive optics

Flury, M. / Benatmane, A. / Gerard, P. et al. | British Library Online Contents | 2003