Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Design, analysis and fabrication of a new MEMS scanning device actuator
Design, analysis and fabrication of a new MEMS scanning device actuator
Design, analysis and fabrication of a new MEMS scanning device actuator
Eliahou-Niv, S. (Autor:in)
APPLIED SURFACE SCIENCE ; 248 ; 503-508
01.01.2005
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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