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A platform for research: civil engineering, architecture and urbanism
Design, analysis and fabrication of a new MEMS scanning device actuator
Design, analysis and fabrication of a new MEMS scanning device actuator
Design, analysis and fabrication of a new MEMS scanning device actuator
Eliahou-Niv, S. (author)
APPLIED SURFACE SCIENCE ; 248 ; 503-508
2005-01-01
6 pages
Article (Journal)
English
DDC:
621.35
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