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On the thermal aspects of ductile regime micro-scratching of single crystal silicon for NEMS/MEMS applications
On the thermal aspects of ductile regime micro-scratching of single crystal silicon for NEMS/MEMS applications
On the thermal aspects of ductile regime micro-scratching of single crystal silicon for NEMS/MEMS applications
Abdel-Aal, H. A. (Autor:in) / Patten, J. A. (Autor:in) / Dong, L. (Autor:in)
WEAR -LAUSANNE- ; 259 ; 1343-1351
01.01.2005
9 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11292
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