Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    On the thermal aspects of ductile regime micro-scratching of single crystal silicon for NEMS/MEMS applications

    New search for: Abdel-Aal, H. A.
    New search for: Patten, J. A.
    New search for: Dong, L.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    On the thermal aspects of ductile regime micro-scratching of single crystal silicon for NEMS/MEMS applications

    New search for: Abdel-Aal, H. A.
    New search for: Patten, J. A.
    New search for: Dong, L.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    On the thermal aspects of ductile regime micro-scratching of single crystal silicon for NEMS/MEMS applications

    New search for: Abdel-Aal, H. A.
    New search for: Patten, J. A.
    New search for: Dong, L.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    On the thermal aspects of ductile regime micro-scratching of single crystal silicon for NEMS/MEMS applications

    Contributors:

    Abdel-Aal, H. A. (author) / Patten, J. A. (author) / Dong, L. (author)

    Published in:

    WEAR -LAUSANNE- ; 259 ; 1343-1351

    Publication date:

    2005-01-01

    Size:

    9 pages

    ISSN:

    0043-1648

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11292

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    Origami MEMS and NEMS

    Rogers, John / Huang, Yonggang / Schmidt, Oliver G. et al. | British Library Online Contents | 2016

    Characterization of Micro/Nano Electro-Mechanical Systems (MEMS/NEMS)

    British Library Online Contents | 2005

    Advanced Processing Techniques for Silicon Carbide MEMS and NEMS

    Zorman, C. A. / Mehregany, M. | British Library Online Contents | 2004

    Ultrananocrystalline and Nanocrystalline Diamond Thin Films for MEMS/NEMS Applications

    Sumant, A.V. / Auciello, O. / Carpick, R.W. et al. | British Library Online Contents | 2010

    Effect of thermal oxidation on indentation and scratching of single-crystal silicon carbide on microscale

    Pohlmann, K. / Bhushan, B. / Zum Gahr, K. H. | British Library Online Contents | 2000

    Back to top