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Fast fabrication of silicon based microstructures using 355 nm UV laser
Fast fabrication of silicon based microstructures using 355 nm UV laser
Fast fabrication of silicon based microstructures using 355 nm UV laser
Pan, C. T. (Autor:in) / Huang, Y. M. (Autor:in) / Hsieh, C. W. (Autor:in)
MATERIALS SCIENCE AND TECHNOLOGY -LONDON- ; 21 ; 1344-1348
01.01.2005
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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