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Phosphorus diffusion into silicon after vapor phase surface adsorption of phosphine
Phosphorus diffusion into silicon after vapor phase surface adsorption of phosphine
Phosphorus diffusion into silicon after vapor phase surface adsorption of phosphine
Kalkofen, B. (Autor:in) / Lisker, M. (Autor:in) / Burte, E. P. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 124-125 ; 288-292
01.01.2005
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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