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Phosphorus diffusion into silicon after vapor phase surface adsorption of phosphine

Kalkofen, B. / Lisker, M. / Burte, E. P.

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Phosphorus diffusion into silicon after vapor phase surface adsorption of phosphine

Kalkofen, B. / Lisker, M. / Burte, E. P.

Phosphorus diffusion into silicon after vapor phase surface adsorption of phosphine

Kalkofen, B. / Lisker, M. / Burte, E. P.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Phosphorus diffusion into silicon after vapor phase surface adsorption of phosphine

Contributors:

Kalkofen, B. (author) / Lisker, M. (author) / Burte, E. P. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 124-125 ; 288-292

Publication date:

2005-01-01

Size:

5 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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