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Molecular dynamics characterization of as-implanted damage in silicon
Molecular dynamics characterization of as-implanted damage in silicon
Molecular dynamics characterization of as-implanted damage in silicon
Santos, I. (Autor:in) / Marques, L. A. (Autor:in) / Pelaz, L. (Autor:in) / Lopez, P. (Autor:in) / Aboy, M. (Autor:in) / Barbolla, J. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 124-125 ; 372-375
01.01.2005
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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